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Deposition Equipment ㆍCVD : GaN MOCVD, ZnO MOCVD, UHVCVD, PECVD, PCVD
ㆍEvaporator : E-beam evaporator, Organic evaporator, Thermal evaporator
ㆍSputters : Magnetron sputter, DC & RF sputter
Structural Analysis ㆍSynchrotron x-ray beamline
ㆍRotating anode x-ray generator
ㆍSmall angle x-ray scattering
ㆍFT-NIMR, FT-IR
ㆍTGA/DSC, GC Mass
Microscopes ㆍAtomic Force Microscope
ㆍTransmission Electron Microscope
ㆍScanning Electron Microscope
Electrical/Magnetic/Optical ㆍMagnetic Property Measurement System (MPMS)
ㆍHall Measurement
ㆍSpectrum Analyzer
ㆍPL-Raman Spectrometer
ㆍUV-VIS Spectrometer
ㆍCoherent lnnova 300C Laser
ㆍProbe Station & Semiconductor Device Analyzer
Lithography ㆍNanoimprint Lithography System
ㆍE-beam Lithography System
ㆍHologram Lithography System