KrF excimer laser
Pulsed laser deposition system (for oxide materials)
Pulsed laser deposition system (for chalcogenides materials)
RF sputter
Atomic layer deposition system
E-beam evaporator (with glancing angle deposition)
Glove box
Oven (for hydrothermal and solvothermal synthesis)
Spincoator
Heating mantle and findenser
Rapid thermal annealing process
Furnace 1 ~ 4
Target fabrication system
